EO Foundry Microlithography Process Database

This database is largely extracted from the Stanford Nanofabrication Laboratory (SNFL) website.  Processes are presented exactly as utilized at SNFL.  These procedures are adapted to produce the same process conditions on our process equipment.  While the brand  names are different, the processes are the same.
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AZ5214 Image Reversal

Backside Protection

Clean for Non-standard Metals

Copper Test Procedure

Edge Bead Removal

EO Foundry Website

Gasline Purge

Hudson Research Website

KOH Processing 

Lift-off

Lo-K Etch 

Manual Developing of Resist

Manual Resist Coating

Plasma Etch: Nitride Etch 

Plasma Etch: Oxide Etch 

Plasma Etch: Polysilicon Etch 

Shipley 3612 Photoresist

SPR220 Thick Resist

TMAH Etching

Tweezer Cleaning Procedures

Wet Oxide Etch (general) 

Wet Oxide Etch (metal

Wet Oxide Etch (non-metal

Wet Processes: Metal Cleaning

Wet Processes: PreDiffusion Cleaning

Wet Processes: PreLPCVD/PreMetal Cleaning

Wet Processing: Resist Strip

                 

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