WHEN is AZ5214 USED?

• For image reversal. Please note this is a labor intensive process, and should be used only when re-design of mask is economically unfeasible or a quick fix is needed.

AZ5214 PROCESS INFORMATION

• Singe - 30 minutes at 150C (unless your wafers came out of a furnace or deposition system and are coated with resist within one hour).

• Prime - SVGCOAT prime program#1 in manual

• Coat - SVGCOAT coat program #3 or Headway spinner at 5000rpm for 30seconds.
• Prebake - SVGCOAT bake program#2 90C for 2 minute.
• Expose - 120mj/cm2
• Post Exposure Bake - 115C for 3 minutes
• Flood UV Expose - The original protocol was for exposure on the Canon501 for 35 seconds. This tool is no longer available. The exposure times on current tools is not yet characterized.
• Develop MF-322 for 60 seconds.

SVGCoat Program 3 should be setup as follows:

Spin	5 sec	5000 rpm	40 accel
spin (dispense)	10 sec	0.100 rpm	20 accel
spin	5 sec	0.25 rpm	40 accel
spin	30	5.00 rpm	40 accel