NON-STANDARD METAL
CLEAN
Important Notes:
- Clean should be done in your own non-standard
metal designated beakers or the gold contaminated beakers found at the
wbgeneral. ONCE the wafers have been cleaned in contaminated beakers or been
in nonstandard metal contaminated equipment they can only go in equipment that
allows the materials they have been exposed to ( see Materials
Allowed).
- If wafers have been scribed or have resist
on them they should get the Resist Strip Non-standard Metal process at
the wbgeneral before going into the Non-standard Metal
Clean.
PROCESS
- 5 minutes in PRS1000 @ 40 C
- Dump Rinse (std 6 cycles) OR overflow rinse for 5
minutes.
- Blow Dry the wafers on clean room lint free
papers using a N2 gun.
- Dump Rinse (std 6 cycles) OR overflow rinse for 5
minutes.
- Blow Dry the wafers on clean room lint free
papers using a N2 gun